Influence of carbon on Ni gettering in C2Hx+ and SiHy+ mixture molecular-ion-implanted silicon epitaxial wafer
-
Published:2024-05
Issue:
Volume:174
Page:108226
-
ISSN:1369-8001
-
Container-title:Materials Science in Semiconductor Processing
-
language:en
-
Short-container-title:Materials Science in Semiconductor Processing
Author:
Hirose RyoORCID,
Onaka-Masada Ayumi,
Okuyama Ryosuke,
Kadono Takeshi,
Kobayashi Koji,
Suzuki Akihiro,
Koga Yoshihiro,
Kurita Kazunari