Molecular dynamics investigation of material deformation behavior of PMMA in nanoimprint lithography-Reference-Cited by-同舟云学术

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Molecular dynamics investigation of material deformation behavior of PMMA in nanoimprint lithography

Published:2020-09-01 Issue:9 Volume:10 Page:095102
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Odujole Jahlani I.¹^ORCID,Desai Salil¹^ORCID

Affiliation:

1. Center of Excellence in Product Design and Advanced Manufacturing, North Carolina A&T State University, Greensboro, North Carolina 27411, USA

Funder

Center of Excellence in Product Design and Advanced Manufacturing, North Carolina A&T State University

National Science Foundation

US Department of Education, Title III HBGI Fellowship

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/5.0014458

Reference28 articles.

1. Imprint of sub‐25 nm vias and trenches in polymers

2. Nanoimprint lithography

3. Sub-10 nm imprint lithography and applications

4. Developing a predictive model for nanoimprint lithography using artificial neural networks

5. 3D Nanoelectronic Computer Architecture and Implementation

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanoimprint Lithography for Next-Generation Carbon Nanotube-Based Devices;Nanomaterials;2024-06-11

2. Bridging Nanomanufacturing and Artificial Intelligence—A Comprehensive Review;Materials;2024-04-02

3. Engineered Nanomaterial Coatings for Food Packaging: Design, Manufacturing, Regulatory, and Sustainability Implications;Micromachines;2024-02-06

4. The effect of boron carbide doping content on the mechanical properties of polyethylene;Journal of Nuclear Science and Technology;2024-01-29

5. Deformation Mechanism of Aluminum, Copper, and Gold in Nanoimprint Lithography Using Molecular Dynamics Simulation;Nanomaterials;2023-12-08

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