Development of a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2743165
Reference6 articles.
1. Proceedings of the IEEE 13th International Conference on MEMS;Sawada R.,2000
2. Design and construction of linear laser encoders that possess high tolerance of mechanical runout
3. A Multi-Degree-of-Freedom Measuring System for CMM Geometric Errors
4. Verification and evaluation method for volumetric and positional errors of CNC machine tools
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