Measurement and modeling of neutral, radical, and ion densities in H2-N2-Ar plasmas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4913623
Reference88 articles.
1. Highly Efficient Silicon Nanoarray Solar Cells by a Single-Step Plasma-Based Process
2. Plasma nanoscience: setting directions, tackling grand challenges
3. Neutral and ion chemistry in low pressure dc plasmas of H2/N2 mixtures: routes for the efficient production of NH3 and NH4+
4. Making silicon nitride film a viable gate dielectric
5. Overview on SiN surface passivation of crystalline silicon solar cells
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