Observed damage during Argon gas cluster depth profiles of compound semiconductors
Author:
Affiliation:
1. National EPSRC XPS Users' Service (NEXUS), School of Mechanical and Systems Engineering, Newcastle University, Newcastle upon Tyne NE1 7RU, United Kingdom
Funder
Engineering and Physical Sciences Research Council (EPSRC)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4892097
Reference17 articles.
1. Materials processing by gas cluster ion beams
2. Gas-cluster ion-beam smoothing of chemo-mechanical-polish processed GaSb(100) substrates
3. The surface damage in titanium nitride associated with lateral sputtering by argon cluster ions
4. Improvements in SIMS continue
5. Cluster secondary ion mass spectrometry of polymers and related materials
Cited by 32 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Surface chemistry of ion beam modified native titania/Ti interfaces examined using X-ray photoelectron spectroscopy;Results in Surfaces and Interfaces;2024-05
2. XPS depth profiling of functional materials: applications of ion beam etching techniques;Materials Chemistry Frontiers;2024
3. Secondary ion mass spectrometry analysis of metal oxides using 70 keV argon, carbon dioxide, and water gas cluster ion beams;Journal of Vacuum Science & Technology B;2023-06-09
4. X-ray photoelectron spectroscopy of thin films;Nature Reviews Methods Primers;2023-05-25
5. Quantifying the surface modification induced by the argon cluster ion bombardment of KGd(WO4)2: Nd single crystal;Materials Research Bulletin;2023-02
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3