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Silicon layer transfer using plasma hydrogenation

Published:2005-09-12 Issue:11 Volume:87 Page:111910
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Chen Peng,Lau S. S.,Chu Paul K.,Henttinen K.,Suni T.,Suni I.,Theodore N. David,Alford T. L.,Mayer J. W.,Shao Lin,Nastasi M.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2048811

Reference14 articles.

1. Silicon on insulator material technology

2. On the mechanism of the hydrogen-induced exfoliation of silicon

3. Thinner Silicon-on-Insulator Using Plasma Hydrogenation

4. Layer-transfer process for silicon-on-insulator with improved manufacturability

5. Plasma hydrogenation of strain-relaxed SiGe∕Si heterostructure for layer transfer

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1. High Quality Nano Thin Layer Silicon Transfer Using Plasma Hydrogenation;Proceedings of the Third International Symposium on Materials and Sustainable Development;2018

2. Low-temperature plasma processing for Si photovoltaics;Materials Science and Engineering: R: Reports;2014-04

3. Progress in direct-current plasma immersion ion implantation and recent applications of plasma immersion ion implantation and deposition;Surface and Coatings Technology;2013-08

4. Surface engineering and modification of biomaterials;Thin Solid Films;2013-01

5. Recent applications of plasma-based ion implantation and deposition to microelectronic, nano-structured, and biomedical materials;Surface and Coatings Technology;2010-06

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