A high sensitivity quartz resonant pressure sensor with differential output and self-correction-Reference-Cited by-同舟云学术

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A high sensitivity quartz resonant pressure sensor with differential output and self-correction

Published:2019-06 Issue:6 Volume:90 Page:065003
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Zhang Quanwei¹^ORCID,Li Cun¹,Zhao Yulong¹^ORCID,Li Bo¹,Han Chao¹

Affiliation:

1. State Key Laboratory for Manufacturing System Engineering, Xi’an Jiaotong University, Xi’an, Shanxi 710049, People’s Republic of China

Funder

Innovation REsearch Group of National Natural Science Fund Committee

Key R&D program of shaanxi

Postdoctoral Science Foundation of China

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5094212

Reference18 articles.

1. A novel MEMS pressure sensor fabricated on an optical fiber

2. Design of an electronic oscillator for resonant pressure sensor with non-collocated sensor and actuator

3. Design and fabrication of resonating AT-quartz diaphragms as pressure transducers

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3. Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging;Microsystems & Nanoengineering;2023-12-19

4. Quartz Resonant Pressure Sensor Based on Bow-Inspired Rationally Designed Device Configuration;IEEE Sensors Journal;2023-11-15

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