Design and fabrication of resonating AT-quartz diaphragms as pressure transducers-Reference-Cited by-同舟云学术

Design and fabrication of resonating AT-quartz diaphragms as pressure transducers

Published:1994-04 Issue:1-3 Volume:42 Page:389-393
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wagner H.-J.,Hartig W.,Büttgenbach S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

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2. Micromachining of quartz and its application to an acceleration sensor;Danel;Sensors and Actuators,1990

3. US Patent No. 4 644 804 (Feb. 24, 1987).

4. A high-sensitivity ribbed and bossed pressure transducer;Johnson;Sensors and Actuators A,1992

5. The constants of alpha quartz;Ward;Proc. 38th Annual Frequency Control Symp., Philadelphia, PA, USA,2911984

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