A statistical model of sputtering

Author:

Schwarz S. A.,Helms C. R.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Reference20 articles.

1. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

2. G. Carter and J. S. Colligon,Ion Bombardment of Solids(Elsevier, New York, 1968).

3. P. D. Townsend, J. C. Kelly, and N. E. W. Hartley,Ion Implantation, Sputtering, and Their Applications(Academic, New York, 1976).

4. Computer simulation of atomic mixing during ion bombardment

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