1.55 μm buried heterostructure laser via regrowth of semi‐insulating InP:Fe around vertical mesas fabricated by reactive ion etching using methane and hydrogen
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.105612
Reference10 articles.
1. High‐speed distributed feedback lasers grown by hydride epitaxy
2. High‐power and high‐speed 1.3 μm V‐grooved inner‐stripe lasers with new semi‐insulating current confinement structures onp‐InP substrates
3. Wide‐bandwidth and high‐power InGaAsP distributed feedback lasers
4. 1.5 μm GaInAsP/InP buried‐heterostructure laser diode fabricated by reactive ion etching using a mixture of ethane and hydrogen
5. High frequency buried heterostructure 1.5 μm GaInAsP/InP lasers, grown entirely by metalorganic vapour phase epitaxy in two epitaxial growth steps
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1. Dependence of selectivity on plasma conditions in selective etching in submicrometer pitch grating on InP surface by CH4/H2 reactive ion etching;Journal of Applied Physics;2011-04
2. Selective Etching and Polymer Deposition on InP Surface in CH4/H2Reactive Ion Etching Using A New Mask Structure for Application to Submicrometer Pitch Grating;Applied Physics Express;2010-05-21
3. Selective etching and polymer deposition on InP surface in reactive ion etching with a mixture of methane and hydrogen;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2009
4. Relaxed germanium films on silicon (110);Thin Solid Films;2008-11
5. Effects of n-type doping on active Fe sites in ion implanted Fe in InP;Applied Physics Letters;2006-06-19
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