Theoretical and experimental investigation of secondary electron emission characteristics of ALD-ZnO conductive films

Author:

Zhu Xiangping12,Guo Junjiang1234,Cao Weiwei12345,Liu Lutao12,Zhang Guangwei6,Sun Xin3,Zhao Wei12ORCID,Si JinHai4

Affiliation:

1. State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an 710119, People’s Republic of China

2. University of Chinese Academy of Sciences (UCAS), Beijing 100049, People’s Republic of China

3. Key Laboratory of Ultrafast Photoelectric Diagnostic Technology, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an 710119, People’s Republic of China

4. Key Laboratory for Physical Electronics and Devices of the Ministry of Education & Shaanxi Key Lab of Information Photonic Technique, School of Electronics & Information Engineering, Xi’an Jiaotong University, Xi'an 710049, People’s Republic of China

5. Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan, Shanxi 030006, People’s Republic of China

6. Zhejiang Fountain Aptitude Technology Inc., Zhejiang, Hangzhou 310051, People’s Republic of China

Funder

Strategic Priority Research Program of Chinese Academy of Sciences

National Key Research and Development Program of China

Equipment Pre-research Field Fund

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

General Physics and Astronomy

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