Off-axis reflection zone plate for quantitative soft x-ray source characterization
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.119497
Reference8 articles.
1. Performance optimization of a high-repetition-rate KrF laser plasma x-ray source for microlithography
2. Review of plane grating focusing for soft x‐ray monochromators
3. A Bragg-Fresnel multilayer electron beam monitor for third generation storage rings
4. A special method to create gratings of variable line density by low voltage electron beam lithography
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