Electromechanical contact of microelectromechanical structure
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2402352
Reference23 articles.
1. Electromechanical instability of microscale structures
2. Silicon-processed overhanging microgripper
3. Proceedings of the IEEE Micro Electro Mechanical Systems;Bobbio S. M.,1993
4. Proceedings of the IEEE Micro Electro Mechanical Systems;Yamaguchi M.,1993
5. Adhesion release and yield enhancement of microstructures using pulsed Lorentz forces
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