Author:
Lai Lei-Jie,Gu Guo-Ying,Zhu Li-Min
Funder
National Natural Science Foundation of China
Reference21 articles.
1. Optimal design of a flexure hinge-based XYZ atomic force microscopy scanner for minimizing Abbe errors
2. Piezoelectrically driven XYθ table for submicron lithography systems
3. B. H. Kang, J. T. Wen, N. G. Dagalakis, and J. J. Gorman, in Proceedings of the 2004 IEEE International Conference on Robotics & Automation (ICRA '04), New Orleans, LA, April 2004, pp. 4097–4102.
4. Stiffness modeling of flexure parallel mechanism
5. Design, implementation, and control of a six-axis compliant stage
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