Reducing adhesion energy of nano-electro-mechanical relay contacts by self-assembled Perfluoro (2,3-Dimethylbutan-2-ol) coating-Reference-Cited by-同舟云学术

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Reducing adhesion energy of nano-electro-mechanical relay contacts by self-assembled Perfluoro (2,3-Dimethylbutan-2-ol) coating

Published:2019-05 Issue:5 Volume:9 Page:055329
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Fathipour Sara¹,Almeida Sergio Fabian²,Ye Zhixin Alice²,Saha Bivas¹³,Niroui Farnaz⁴,King Liu Tsu-Jae²,Wu Junqiao¹³

Affiliation:

1. Department of Materials Science and Engineering, University of California, Berkeley, California 94720, USA

2. Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, California 94720, USA

3. Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA

4. Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA

Funder

National Science Foundation

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5095760

Reference22 articles.

1. Ultralow-voltage, minimum-energy CMOS

2. The end of CMOS scaling

3. Tunnel field-effect transistors as energy-efficient electronic switches

4. Mechanical Computing Redux: Relays for Integrated Circuit Applications

5. Demonstration of Integrated Micro-Electro-Mechanical Relay Circuits for VLSI Applications

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1. Tunable Functionality of Pure Nano Cu- and Cu-based Oxide Flexible Conductive Thin Film with Superior Surface Modification;Surfaces and Interfaces;2023-06

2. Experimental and Theoretical Investigation of Nucleation Site Density and Heat Transfer During Dropwise Condensation on Thin Hydrophobic Coatings;Journal of Heat Transfer;2022-04-05

3. Utilizing mechanical adhesion force as a high contact force in a MEMS relay;Sensors and Actuators A: Physical;2021-11

4. Poly‐ SiGe Surface Micromachining;3D and Circuit Integration of MEMS;2021-04-23

5. Optical and surface energy probe of Hamaker constant in copper oxide thin films for NEMS and MEMS stiction control applications;Scientific Reports;2021-02-19

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