Mechanisms of carbon and oxygen incorporation into thin metal films grown by laser photolysis of carbonyls
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.338101
Reference19 articles.
1. The Deposition of Molybdenum and Tungsten Films from Vapor Decomposition of Carbonyls
2. Low‐temperature refractory metal film deposition
3. Deposition of refractory metal films by rare‐gas halide laser photodissociation of metal carbonyls
4. Direct Writing of Refractory Metal Thin Film Structures by Laser Photodeposition
5. Laser photodeposition of refractory metals
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