Debris elimination in a droplet‐target laser‐plasma soft x‐ray source
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1146174
Reference16 articles.
1. Soft x-ray radiation from laser-produced plasmas: characterization of radiation emission and its use in x-ray lithography
2. Droplet target for low-debris laser-plasma soft X-ray generation
3. Repetitively pulsed-plasma soft x-ray source
4. Soft x‐ray emission from ω0, 2ω0, and 4ω0laser‐produced plasmas
5. Debris and VUV emission from a laser-produced plasma operated at 150 Hz using a krypton fluoride laser
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