Soft x-ray radiation from laser-produced plasmas: characterization of radiation emission and its use in x-ray lithography
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Publisher
The Optical Society
Reference12 articles.
1. Lithography and High-Resolution Radiography with Pulsed X-Rays
2. Lithography and High-Resolution Radiography with Pulsed X-Rays
3. Submicron x‐ray lithography using laser‐produced plasma as a source
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1. Comparison of the laser-induced plasma of different metal targets as X-rays sources in vacuum;Radiation Effects and Defects in Solids;2018-09-10
2. Effects of target thickness on spectral characteristics of x-ray flux from the laser-produced plasmas;Acta Physica Sinica;2004
3. Droplet‐target laser‐plasma source for proximity x‐ray lithography;Applied Physics Letters;1996-05-06
4. Investigation of contact lithography in the 5–20 nm region with a laser plasma source;Optics & Laser Technology;1995-12
5. Debris elimination in a droplet‐target laser‐plasma soft x‐ray source;Review of Scientific Instruments;1995-10
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