Subject
Physics and Astronomy (miscellaneous)
Cited by
47 articles.
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1. Nanolithography and Nanochemistry: Probe-Related Patterning Techniques and Chemical Modification for Nanometer-Sized Devices;Angewandte Chemie International Edition;2004-05-03
2. Characterization of multicusp-plasma ion source brightness using micron-scale apertures;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2001
3. A review of ion projection lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-05
4. Microlithography: An overview;Advanced Materials for Optics and Electronics;1994-03
5. Focused ion beam technologies for lithographic applications;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1989-02