Author:
Veyan J.-F.,Aureau D.,Gogte Y.,Campbell P.,Yan X.-M.,Chabal Y. J.
Subject
General Physics and Astronomy
Reference33 articles.
1. Reactions of photogenerated free radicals at surfaces of electronic materials
2. Etch rates for micromachining processing-part II
3. Isotropic etching of silicon in fluorine gas for MEMS micromachining
4. Proceedings of the 1999 IEEE Canadian Conference on Electrical and Computer Engineering;Chan I. W. T.,1999
5. Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems;Choi J. -J.,1998
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