Ar dilution effects on the elastic properties of hydrogenated amorphous hard-carbon films grown by plasma-enhanced chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1330762
Reference18 articles.
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1. High aspect ratio contact hole etching using relatively transparent amorphous carbon hard mask deposited from propylene;Thin Solid Films;2010-08
2. Low–frequency Raman and Brillouin spectroscopy from graphite, diamond and diamond–like carbons, fullerenes and nanotubes;Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences;2004-09-27
3. Amorphous hydrogenated carbon films deposited by PECVD: influence of the substrate temperature on film growth and microstructure;Journal of Non-Crystalline Solids;2004-06
4. Amorphous hydrogenated carbon films deposited by PECVD in methane atmospheres highly diluted in argon: effect of the substrate temperature;Diamond and Related Materials;2004-04
5. Acoustic phonon propagation and elastic properties of nano-sized carbon films investigated by Brillouin light scattering;Thin Solid Films;2002-12
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