Measurement techniques to improve the accuracy of x-ray mirror metrology using stitching Shack–Hartmann wavefront sensors-Reference-Cited by-同舟云学术

Measurement techniques to improve the accuracy of x-ray mirror metrology using stitching Shack–Hartmann wavefront sensors

Published:2021-11-01 Issue:11 Volume:92 Page:113103
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Adapa Bharath Reddy¹²^ORCID,Dovillaire Guillaume²,Vivo Amparo¹,Perrin Francois¹,Mayer Rafael²,Barrett Raymond¹

Affiliation:

1. The European Synchrotron (ESRF), 71 Avenue des Martyrs, CS 40220, 38043 Grenoble Cedex 9, France

2. Imagine Optic, 18 Rue Charles de Gaulle, 91400 Orsay, France

Funder

Eurostars

Imagine Optic

European Synchrotron Radiation Facility

Publisher

AIP Publishing

Subject

Instrumentation

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0067871

Reference29 articles.

1. F. Siewert, in Modern Developments in X-Ray and Neutron Optics, edited by A. Erko, D. M. Idir, D. T. Krist, and P. A. G. Michette (Springer, Berlin, Heidelberg, 2008), pp. 175–179.

2. Advances in X-ray optics: From metrology characterization to wavefront sensing-based optimization of active optics

3. Design Of A Long Trace Surface Profiler

4. Surface Topography Measurements Over The 1 Meter To 10 Micrometer Spatial Period Bandwidth

5. A. Rommeveaux, M. Thomasset, and D. Cocco, in Modern Developments in X-Ray and Neutron Optics, edited by A. Erko, M. Idir, T. Krist, and A. G. Michette (Springer, Berlin, Heidelberg, 2008), pp. 181–191.

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