Metal-ion subplantation: A game changer for controlling nanostructure and phase formation during film growth by physical vapor deposition
Author:
Affiliation:
1. Thin Film Physics Division, Department of Physics (IFM), Linköping University, SE-581 83 Linköping, Sweden
2. Materials Chemistry, RWTH Aachen University, Kopernikusstr. 10, D-52074 Aachen, Germany
Funder
Aforsk foundation
Deutsche Forschungsgemeinschaft
Knut och Alice Wallenbergs Stiftelse
Vetenskapsrådet
VINNOVA
Carl Tryggers Stiftelse för Vetenskaplig Forskning
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5141342
Reference109 articles.
1. Review Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017
2. Microstructural evolution during film growth
3. Structure Modification by Ion Bombardment during Deposition
4. Effect of ion bombardment during deposition on the x‐ray microstructure of thin silver films
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