Understanding of the development of in-plane residual stress in sol-gel-derived metal oxide thin films-Reference-Cited by-同舟云学术

Understanding of the development of in-plane residual stress in sol-gel-derived metal oxide thin films

Published:2012-01 Issue:1 Volume:111 Page:014901
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Ohno Kentaro,Uchiyama Hiroaki,Kozuka Hiromitsu

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.3673330

Reference39 articles.

1. The decohesion of thin films from brittle substrates

2. Stress evolution on gel-to-ceramic thin film conversion

3. H. Kozuka, in Handbook of Sol-Gel Science and Technology:Processing,Characterization and Applications, Volume 1, edited by S. Sakka (Kluwer Academic Publishers, Norwell, 2005), pp. 247–287.

4. Stress induced shift of the Curie point in epitaxial PbTiO3thin films

5. Effect of rapid thermal annealing on residual stress in lead titanate thin film by chemical solution deposition

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