Growth law for disk precipitates, and oxygen precipitation in silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.96969
Reference26 articles.
1. Precipitation of oxygen in silicon: Some phenomena and a nucleation model
2. Effects of ambients on oxygen precipitation in silicon
3. Precipitation of oxygen in silicon kinetics, solubility, diffusivity and particle size
4. Theory of diffusion-limited precipitation
5. Early stages of oxygen segregation and precipitation in silicon
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3. About the influence of deposited nitride layers on oxide precipitation after RTA pre‐treatment;physica status solidi (a);2017-05-26
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