Influence of thickness and dielectric properties on implantation efficacy in plasma immersion ion implantation of insulators
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1666976
Reference25 articles.
1. Surface modification of poly(ethylene terephthalate) fibers induced by radio frequency air plasma treatment
2. Effects of plasma treatment and metal-ion chelation on lightfastness of dyed polyester/cotton fabric
3. Metallic contamination in hydrogen plasma immersion ion implantation of silicon
4. Oxygen-induced nickel segregation in nitrogen plasma implanted AISI 304 stainless steel
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