Macroparticle‐free thin films produced by an efficient vacuum arc deposition technique
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.354431
Reference10 articles.
1. Components of cathode erosion in vacuum arcs
2. Properties of tetrahedral amorphous carbon prepared by vacuum arc deposition
3. Diamond-like carbon coatings by arc-discharge methods
4. Comparison of two filtered cathodic arc sources
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