Author:
Seger J.,Hellström P.-E.,Lu J.,Malm B. G.,von Haartman M.,Östling M.,Zhang S.-L.
Subject
Physics and Astronomy (miscellaneous)
Reference20 articles.
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2. Salicidation process using NiSi and its device application
3. Structural investigation of self-aligned silicidation on separation by implantation oxygen
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