Monolithic integration of a thin and short metal‐semiconductor‐metal photodetector with a GaAlAs optical inverted rib waveguide on a GaAs semi‐insulating substrate
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.102134
Reference11 articles.
1. Monolithic InGaAs photodiode array illuminated through an integrated waveguide
2. Planar embedded GaInAs photodiode on semi-insulating InP substrate for monolithic integration
3. Monolithic integrated InGaAlAs/InP ridge waveguide photodiodes for 1.55 μm operation grown by molecular beam epitaxy
4. Waveguide-integrated pin photodiode on InP
5. Monolithic integrated waveguide photodetector
Cited by 11 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Metal Semiconductor Metal Photodetectors;Wiley Encyclopedia of Electrical and Electronics Engineering;1999-12-27
2. Design and fabrication of low-loss polymer waveguide components for on-chip optical interconnection;IEEE Photonics Technology Letters;1996-12
3. Cutoff frequency and responsivity limitation of AlInAs/GaInAs MSM PD using a two dimensional bipolar physical model;IEEE Transactions on Electron Devices;1995
4. Monolithic integration of optical waveguide circuitry with III-V photodetectors for advanced lightwave receivers;Journal of Lightwave Technology;1993
5. Enhanced long wavelength response in a GaAs photodetector;Applied Physics Letters;1992-11-23
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