Thermal donor annihilation and defect production inn‐type silicon by rapid thermal annealing
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.344076
Reference26 articles.
1. Spectroscopic studies of 450° C thermal donors in silicon
2. Nature of thermal donors in silicon crystals
3. Oxygen‐related thermal donors in silicon: A new structural and kinetic model
4. On the kinetics of thermal donor formation in silicon
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