Dislocation structure and microstrain evolution during spinodal decomposition of reactive magnetron sputtered heteroepixatial c-(Ti0.37,Al0.63)N/c-TiN films grown on MgO(001) and (111) substrates-Reference-Cited by-同舟云学术

Dislocation structure and microstrain evolution during spinodal decomposition of reactive magnetron sputtered heteroepixatial c-(Ti0.37,Al0.63)N/c-TiN films grown on MgO(001) and (111) substrates

Published:2019-03-14 Issue:10 Volume:125 Page:105301
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Calamba K. M.¹²^ORCID,Pierson J. F.²^ORCID,Bruyère S.²^ORCID,Febvrier A. L.³^ORCID,Eklund P.³^ORCID,Barrirero J.¹⁴,Mücklich F.⁴,Boyd R.¹,Johansson Jõesaar M. P.¹⁵,Odén M.¹^ORCID

Affiliation:

1. Nanostructured Materials, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping SE-58183, Sweden

2. Université de Lorraine, CNRS, IJL, F-54000 Nancy, France

3. Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping SE-58183, Sweden

4. Functional Materials, Department of Materials Science, Saarland University, Saarbrucken DE-66123, Germany

5. SECO Tools AB, Fagersta SE-73782, Sweden

Funder

European Union's Erasmus Mundus doctoral program in Material's Science and Engineering

Federal State Government of Saarland, Germany

Svenska Forskningsrådet Formas

VINNOVA

Publisher