Irradiation enhanced diffusion of boron in delta-doped silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1363685
Reference15 articles.
1. Experiments on atomic-scale mechanisms of diffusion
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4. Reactions of point defects and dopant atoms in silicon
5. Energetics of Self-Interstitial Clusters in Si
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2. Ag diffusion in SiC high-energy grain boundaries: Kinetic Monte Carlo study with first-principle calculations;Computational Materials Science;2016-08
3. Role of self-interstitials on B diffusion in Ge;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-07
4. Delta-doping of boron atoms by photoexcited chemical vapor deposition;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2012-03
5. Radiation enhanced diffusion of B in crystalline Ge;Thin Solid Films;2010-02
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