Author:
Magee T. J.,Leung C.,Kawayoshi H.,Furman B.,Hopkins C. G.,Evans C. A.
Subject
General Physics and Astronomy
Cited by
15 articles.
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1. Non-doping light impurities in silicon for solar cells;Materials Science and Engineering: B;1996-01
2. Non-doping light impurities in silicon for solar cells;C,H,N and O in Si and Characterization and Simulation of Materials and Processes;1996
3. Observation of microscopic impurity distributions in InP using ion microscope;Journal of Crystal Growth;1990-06
4. Gold Gettering in Directly Bonded Silicon Wafers;Japanese Journal of Applied Physics;1989-05-20
5. Implant and impurity redistribution during ion induced TaSi2 formation;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1987-01