Back surface gettering of Au in GaAs

Author:

Magge T. J.,Peng J.,Hong J. D.,Katz W.,Evans C. A.

Publisher

Wiley

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference9 articles.

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Dislocations in GaAs Crystals;Defects and Properties of Semiconductors;1987

2. The effects of substrate gettering on GaAs MESFET performance;IEEE Transactions on Electron Devices;1985-12

3. Impurity and Defect Levels (Experimental) in Gallium Arsenide;Advances in Electronics and Electron Physics Volume 61;1983

4. Low‐temperature redistribution and gettering of oxygen in silicon;Journal of Applied Physics;1981-08

5. Ion beam gettering in AIII−BV compounds compared to silicon;Acta Physica Academiae Scientiarum Hungaricae;1981-07

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