Annealing characteristics of ion‐implanted p‐channel MOS transistors
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1663045
Reference14 articles.
1. THE ADJUSTMENT OF MOS TRANSISTOR THRESHOLD VOLTAGE BY ION IMPLANTATION
2. A complementary MOS 1.2 volt watch circuit using ion implantation
3. Characteristics of p-channel MOS field effect transistors with ion-implanted channels
4. Threshold voltage and ``gain'' term β of ion‐implanted enhancement‐mode n‐channel MOS transistors
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1. Shallow boron‐doped junctions in silicon;Journal of Applied Physics;1985-02-15
2. Temperature dependence of capacitance-voltage characteristics in implanted MOS structures;physica status solidi (a);1982-04-16
3. A system for measuring deep‐level spatial concentration distributions;Journal of Applied Physics;1982-01
4. Ion Implantation Processes in Silicon;Impurity Doping Processes in Silicon;1981
5. Characterization of31P+‐implanted Si layers by ellipsometry;Journal of Applied Physics;1979-06
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