Epitaxial C49–TiSi2 phase formation on the silicon (100)
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1604955
Reference19 articles.
1. Comparison of transformation to low-resistivity phase and agglomeration of TiSi/sub 2/ and CoSi/sub 2/
2. Low-resistance self-aligned Ti-silicide technology for sub-quarter micron CMOS devices
3. Metastable phase formation in titanium‐silicon thin films
4. The growth of titanium silicides in thin film Ti/Si structures
5. Electronic structure ofTiSi2
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