Nanoelectromechanical nonvolatile memory device incorporating nanocrystalline Si dots
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2360143
Reference16 articles.
1. On a micro-electro-mechanical nonvolatile memory cell
2. Nanostructured silicon for studying fundamental aspects of nanomechanics
3. Nanodevice motion at microwave frequencies
4. Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals
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