Atomic scale study of oxidation of hafnium: Formation of hafnium core and oxide shell
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2360148
Reference32 articles.
1. Hafnium and zirconium silicates for advanced gate dielectrics
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5. Atomic layer deposition of high-κ dielectrics on nitrided silicon surfaces
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