Solubility of hydrogen in silicon at 1300 °C
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.108602
Reference4 articles.
1. On the permeation of hydrogen and helium in single crystal silicon and germanium at elevated temperatures
2. On the solubility and diffusion coefficient of tritium in single crystals of silicon
3. Concentration of atomic hydrogen diffused into silicon in the temperature range 900–1300 °C
4. Passivation of shallow impurities in Si by annealing in H2at high temperature
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