Passivation of shallow impurities in Si by annealing in H2at high temperature
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.106099
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1. Hydrogen in crystalline semiconductors
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3. Oxygen-related SiH IR stretching bands in Fz-Si grown in a hydrogen atmosphere
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