Novel technique for Si epitaxial lateral overgrowth: Tunnel epitaxy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.102061
Reference6 articles.
1. Lateral Epitaxial Overgrowth of Silicon on SiO2
2. Growth Process of Silicon Over SiO2 by CVD: Epitaxial Lateral Overgrowth Technique
3. Control of lateral epitaxial chemical vapor deposition of silicon over insulators
4. Silicon Selective Epitaxial Growth over Thick SiO2Islands
5. Lateral epitaxial overgrowth of silicon over recessed oxide
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