Fabrication of dry etched CdZnSe/ZnSe quantum wires by thermally assisted electron cyclotron resonance etching
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.119533
Reference14 articles.
1. Plasma etching of ZnS, ZnSe, CdS, and CdTe in electron cyclotron resonance CH4/H2/Ar and H2/Ar discharges
2. Photoluminescence in ZnSe‐based quantum well wire structures
3. Photoluminescence of quantum well structures fabricated by reactive ion etching
4. Photoluminescence of CdTe / ZnTe semiconductor wires and dots
5. Reactive ion etching of epitaxial ZnSe thin films
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