Crystalline SiGe films grown on Si substrates using laser-assisted plasma-enhanced chemical vapor deposition at low temperature
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2779103
Reference20 articles.
1. Laterally scaled Si-Si/sub 0.7/Ge/sub 0.3/ n-MODFETs with f/sub max/>200 GHz and low operating bias
2. Microwave Noise Performance and Modeling of SiGe-Based HFETs
3. Noise in SiGe HBT RF Technology: Physics, Modeling, and Circuit Implications
4. Study of strain relaxation in Si/SiGe metal-oxide-semiconductor field-effect transistors
5. Fabrication of epitaxial SiGe optical waveguide structures
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1. Stress Evolution during Ge Nanoparticles Growth in a SiO2 Matrix;Inorganic Chemistry;2018-11-14
2. Stable and low contact resistance electrical contacts for high temperature SiGe thermoelectric generators;Scripta Materialia;2018-07
3. Effect of CO2 Laser on SiNx Films Fabricated by Low-Temperature Laser-Assisted Plasma Enhanced Chemical Vapor Deposition;Nanoscience and Nanotechnology Letters;2016-07-01
4. n +-Microcrystalline-Silicon Tunnel Layer in Tandem Si-Based Thin Film Solar Cells;Journal of Electronic Materials;2016-06-08
5. Performance Improvement of Microcrystalline p-SiC/i-Si/n-Si Thin Film Solar Cells by Using Laser-Assisted Plasma Enhanced Chemical Vapor Deposition;International Journal of Photoenergy;2014
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