Improvements in electrical properties of (Ba,Sr)TiO3 capacitor with chemical vapor deposited Pt top electrode using Pt hexafluoroacetylacetonate
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124139
Reference11 articles.
1. Preparation ofPb(Zr,Ti)O3Thin Films on Ir andIrO2Electrodes
2. Template approaches to growth of oriented oxide heterostructures on SiO2/Si
3. Dielectric breakdown in high-ε films for ulsi DRAMs: III. Leakage current precursors and electrodes
4. A comparative study on the electrical conduction mechanisms of (Ba0.5Sr0.5)TiO3 thin films on Pt and IrO2 electrodes
5. Variation of Electrical Conduction Phenomena of Pt/(Ba,Sr)TiO3/Pt Capacitors by Different Top Electrode Formation Processes
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