Optical properties, structural parameters, and bonding of highly textured rocksalt tantalum nitride films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3043882
Reference54 articles.
1. Ultrathin Diffusion Barriers/Liners for Gigascale Copper Metallization
2. The electrical property of plasma-treated Ta/TaNx diffusion barrier
3. A comparative study of CrN, ZrN, NbN and TaN layers as cobalt diffusion barriers for CVD diamond deposition on WC–Co tools
4. Effectiveness of reactive sputter-deposited Ta–N films as diffusion barriers for Ag metallization
5. Real-time spectroscopic ellipsometry study of ultrathin diffusion barriers for integrated circuits
Cited by 32 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A review on barrier layers used in flexible stainless-steel based CIGS photovoltaic devices;npj Flexible Electronics;2023-08-07
2. Research and Application Progress of Conductive Films in Energy Storage Devices;Advanced Materials Technologies;2023-04-28
3. Investigation on the effect of Potassium on the structural, optical and thermal properties of the L-Threonine Cadmium acetate: Elucidation of organo-cadmium compound for dielectric filters;Journal of Materials Science: Materials in Electronics;2023-01
4. Density functional theory study of bulk properties of transition metal nitrides;Physical Chemistry Chemical Physics;2023
5. Structure, electrical, and optical properties of reactively sputter-deposited Ta—Al—N thin films;Journal of Applied Physics;2022-03-14
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3