Increased thermal conductivity and decreased electron–phonon coupling factor of the aluminum scandium intermetallic phase (Al3Sc) compared to solid solutions

Author:

Hirt Daniel1ORCID,Islam Md. Rafiqul1,Hoque Md. Shafkat Bin1ORCID,Hutchins William1,Makarem Sara2ORCID,Lenox Megan K.2ORCID,Riffe William T.2ORCID,Ihlefeld Jon F.23ORCID,Scott Ethan A.1ORCID,Esteves Giovanni4ORCID,Hopkins Patrick E.125ORCID

Affiliation:

1. Department of Mechanical and Aerospace Engineering, University of Virginia 1 , Charlottesville, Virginia 22904, USA

2. Department of Materials Science and Engineering, University of Virginia 2 , Charlottesville, Virginia 22904, USA

3. Charles L. Brown Department of Electrical and Computer Engineering, University of Virginia 3 , Charlottesville, Virginia 22904, USA

4. Microsystems Engineering, Science and Applications (MESA), Sandia National Laboratories 4 , Albuquerque, New Mexico 87123, USA

5. Department of Physics, University of Virginia 5 , Charlottesville, Virginia 22904, USA

Abstract

Aluminum scandium alloys and their intermetallic phases have arisen as potential candidates for the next generation of electrical interconnects. In this work, we measure the in-plane thermal conductivity and electron–phonon coupling factor of aluminum scandium alloy thin films deposited at different temperatures, where the temperature is used to control the grain size and volume fraction of the Al3Sc intermetallic phase. As the Al3Sc intermetallic formation increases with higher deposition temperature, we measure increasing in-plane thermal conductivity and a decrease in the electron–phonon coupling factor, which corresponds to an increase in grain size. Our findings demonstrate the role that chemical ordering from the formation of the intermetallic phase has on thermal transport.

Funder

Semiconductor Research Corporation

National Science Foundation

Publisher

AIP Publishing

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