Nano-metrology: The art of measuring X-ray mirrors with slope errors <100 nrad
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4949272
Reference20 articles.
1. History of Mirrors Dating Back 8000 Years
2. OSA Technical Digest;Hänsel T.,2004
3. Development of a numerically controlled elastic emission machining system for fabricating mandrels of ellipsoidal focusing mirrors used in soft x-ray microscopy
4. On the characterization of ultra-precise X-ray optical components: advances and challenges inex situmetrology
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