A study of the failure mechanism of a titanium nitride diffusion barrier
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371173
Reference19 articles.
1. Diffusion barriers in thin films
2. Interfacial reactions between aluminum and transition‐metal nitride and carbide films
3. Phase equilibria in thin-film metallizations
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