Dual-mode thin film bulk acoustic wave resonator and filter
Author:
Affiliation:
1. The Institute of Technological Sciences, Wuhan University, Wuhan, Hubei 430072, China
Funder
National Natural Science Foundation of China
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/5.0028702
Reference16 articles.
1. Bulk acoustic wave RF technology
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3. Shear mode FBARs as highly sensitive liquid biosensors
4. C. J. Chung, Y. C. Chen, C. C. Cheng, C. M. Wang, and K. S. Kao, “Superior dual mode resonances for 1/4 lambda solidly mounted resonators,” in IEEE International Frequency Control Symposium (IEEE, 2008), pp. 250–253.
5. Dependence of the electromechanical coupling on the degree of orientation of c-textured thin AlN films
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