Fourier-transform infrared and optical emission spectroscopy of CF4/O2/Ar mixtures in an inductively coupled plasma
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1563819
Reference52 articles.
1. Measurement of the gas temperature in fluorocarbon radio frequency discharges using infrared absorption spectroscopy
2. Laser induced fluorescence detection of CF and CF2radicals in a CF4/O2plasma
3. Concentration profiles of CF in a CF4 radio frequency discharge via laser induced fluorescence and actinometry
4. Spectroscopic diagnostics of CF4‐O2 plasmas during Si and SiO2 etching processes
5. CF and CF2actinometry in a CF4/Ar plasma
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